Facilities
Analytic System |
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SEM + EDS with E-beam writer |
Nikon 50I 螢光顯微鏡 |
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Nikon Eclipse TS100 倒立顯微鏡 |
FTIR |
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Cluster |
Vector Network Analysis - Agilent E8364A |
Fabrication Process |
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E-gun evaporator(Shared with prof. 林鶴南 和 prof. 徐文光) |
快速升降溫製程(RTP) |
Furnace System |
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Furnace System |
CVD System |
Optics Measurement System |
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Optics Measurement System |
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Bio Analytic |
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Auto Clave |
CO2 Incubator |
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Water Bath |
Vacuum Pump |
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Culture Room (outside) |
Culture Room (inside) |
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-20度C冰箱 |
超高速離心機CN-10000 |
Simulation Software |
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